Novel approach to produce polymerized hydrocarbon coatings using dielectric barrier controlled atmospheric pressure glow discharge plasma

Novel approach to produce polymerized hydrocarbon coatings using dielectric barrier controlled atmospheric pressure glow discharge plasma

Conventionally, low-pressure (

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Veröffentlicht in:Review of scientific instruments 2002-09, Vol.73 (9), p.3251-3257
Hauptverfasser: Mishra, K. K., Khardekar, R. K., Singh, Rashmi, Pant, H. C.
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container_end_page 3257
container_issue 9
container_start_page 3251
container_title Review of scientific instruments
container_volume 73
creator Mishra, K. K.
Khardekar, R. K.
Singh, Rashmi
Pant, H. C.
description Conventionally, low-pressure (
doi_str_mv 10.1063/1.1499538
format Article
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K. ; Khardekar, R. K. ; Singh, Rashmi ; Pant, H. C.</creator><creatorcontrib>Mishra, K. K. ; Khardekar, R. K. ; Singh, Rashmi ; Pant, H. C.</creatorcontrib><description>Conventionally, low-pressure (&lt;1 Torr) electrical discharges are used for material processing and thin-film deposition. These schemes suffer mainly due to the high cost of equipment and the complexity of operations. The atmospheric pressure glow discharge plasma is developed using a threaded styled electrode in different configurations, and these reactors are used to produce plasma polymerized coatings, required on plane substrates as self-supporting films to obtain membranes for blocking holes in cavities, and on microballoon targets, which are used as fuel containers for inertial confinement fusion, to avoid DT gas permeation. Helium gas is used as the supporting gas for formation and stabilization of atmospheric pressure glow discharge plasma reactors. Ethylene and acetylene gases are used as monomers to produce plasma polymerized hydrocarbon films. These films are characterized using scanning electron microscopy. Plasma polymerized coatings of thickness 100 nm–10 μm with a smooth surface finish (rms&lt;100 nm) are deposited successfully. The surface finish is further improved using a postdischarge configuration. Preliminary results are very encouraging but further progress is to be made in this area. 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The atmospheric pressure glow discharge plasma is developed using a threaded styled electrode in different configurations, and these reactors are used to produce plasma polymerized coatings, required on plane substrates as self-supporting films to obtain membranes for blocking holes in cavities, and on microballoon targets, which are used as fuel containers for inertial confinement fusion, to avoid DT gas permeation. Helium gas is used as the supporting gas for formation and stabilization of atmospheric pressure glow discharge plasma reactors. Ethylene and acetylene gases are used as monomers to produce plasma polymerized hydrocarbon films. These films are characterized using scanning electron microscopy. Plasma polymerized coatings of thickness 100 nm–10 μm with a smooth surface finish (rms&lt;100 nm) are deposited successfully. The surface finish is further improved using a postdischarge configuration. 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These schemes suffer mainly due to the high cost of equipment and the complexity of operations. The atmospheric pressure glow discharge plasma is developed using a threaded styled electrode in different configurations, and these reactors are used to produce plasma polymerized coatings, required on plane substrates as self-supporting films to obtain membranes for blocking holes in cavities, and on microballoon targets, which are used as fuel containers for inertial confinement fusion, to avoid DT gas permeation. Helium gas is used as the supporting gas for formation and stabilization of atmospheric pressure glow discharge plasma reactors. Ethylene and acetylene gases are used as monomers to produce plasma polymerized hydrocarbon films. These films are characterized using scanning electron microscopy. Plasma polymerized coatings of thickness 100 nm–10 μm with a smooth surface finish (rms&lt;100 nm) are deposited successfully. The surface finish is further improved using a postdischarge configuration. Preliminary results are very encouraging but further progress is to be made in this area. We are also planning to extend this technique for C:H coating of microballoons, which are used as fuel containers in inertial confinement fusion.</abstract><doi>10.1063/1.1499538</doi><tpages>7</tpages></addata></record>
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title Novel approach to produce polymerized hydrocarbon coatings using dielectric barrier controlled atmospheric pressure glow discharge plasma
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