A multiple pin, flip-chip system for microwave and gigabit per second cryogenic device testing at variable temperatures

We have developed a cryogenic probe and cryostat system to test both active and passive superconducting devices and circuits up to microwave frequencies at variable temperatures. Our system consists of two basic parts: the cryostat and the matching probe. The cryostat is a unique, very efficient, variable temperature, flow-type cryostat, where we control temperature without electrical heaters. It is magnetically shielded and allows rapid testing between 4.2 K and room temperature. Probes developed for this cryostat have a larger number of shorter cables than standard dip-type probes. They are designed to test chips or chip assemblies without additional packaging. Chips or chip assemblies can be quickly mounted and dismounted from a fixed spring-contact assembly. Each probe has 56 wide-bandwidth signal cables. We have repeatedly used these probes for testing both active and passive superconducting integrated circuits up to 20 GHz. The probe and cryostat combination provides a testing capability that is simultaneously high frequency, dc magnetic shielded, has variable cryogenic temperature, and quick turnaround.