Measurement of quantum efficiency of a charge coupled device
We report a measurement of the quantum efficiency of a charge coupled device (CCD) with a simple method and report a resultant quantum efficiency in the energy range from 0.47 to 9 keV. The CCD is a front side illuminated device and is fabricated by Hamamatsu Photonics K.K. The quantum efficiency fo...
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Veröffentlicht in: | Review of scientific instruments 1998-11, Vol.69 (11), p.3746-3750 |
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Hauptverfasser: | , , , , , , , , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | We report a measurement of the quantum efficiency of a charge coupled device (CCD) with a simple method and report a resultant quantum efficiency in the energy range from 0.47 to 9 keV. The CCD is a front side illuminated device and is fabricated by Hamamatsu Photonics K.K. The quantum efficiency for 4.5 keV x rays is 11% for the single pixel events, 33% for the spectroscopic events, and 60% for flux mode operation. We present the quantum efficiency as a function of the energy. |
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ISSN: | 0034-6748 1089-7623 |
DOI: | 10.1063/1.1149173 |