X‐ray microfabrication activities at the Center for Advanced Microstructures and Devices (CAMD) (invited)

X‐ray microfabrication activities at the Center for Advanced Microstructures and Devices (CAMD) (invited)

The x‐ray lithography and micromachining facility at CAMD is described. It consists of four dedicated beamlines and exposure stations using the synchrotron radiation delivered by the CAMD storage ring and 230 m2 of fully equipped clean room. The scientific and engineering activities exemplified by r...

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Veröffentlicht in:Review of Scientific Instruments 1996-09, Vol.67 (9), p.3378-3378
Hauptverfasser: Malek, C. Khan, Vladimirsky, Y., Vladimirsky, O., Scott, J., Craft, B., Saile, V.
Format: Artikel
Sprache:eng
Schlagworte:
FABRICATION
INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS
LITHOGRAPHY
MACHINING
MICROSTRUCTURE
STORAGE RINGS
SYNCHROTRON RADIATION SOURCES
USES
X RADIATION
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Beschreibung
Zusammenfassung:The x‐ray lithography and micromachining facility at CAMD is described. It consists of four dedicated beamlines and exposure stations using the synchrotron radiation delivered by the CAMD storage ring and 230 m2 of fully equipped clean room. The scientific and engineering activities exemplified by results of current studies are reported.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1147311