Electrodeless thin film conductance measurements using the Sommer–Tanner method

A method to determine the electrical conductance of thin films such as a‐Si:H that does not require contacting electrodes is presented. This method, introduced by Sommer and Tanner, is based on measuring the phase shift of a capacitive transmission line. The lower detection limit for the geometry us...

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Veröffentlicht in:Review of scientific instruments 1996-10, Vol.67 (10), p.3624-3626
Hauptverfasser: Severens, R. J., Verhoeven, H. J. M., Schaepkens, M., van de Sanden, M. C. M., Schram, D. C.
Format: Artikel
Sprache:eng
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Zusammenfassung:A method to determine the electrical conductance of thin films such as a‐Si:H that does not require contacting electrodes is presented. This method, introduced by Sommer and Tanner, is based on measuring the phase shift of a capacitive transmission line. The lower detection limit for the geometry used here is 10−11 Ω−1, which makes it suitable to determine the photoconductivity of a‐Si:H thin films. The method shows reasonable agreement with classical conductance measurements using sputtered electrodes.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1147125