Electrodeless thin film conductance measurements using the Sommer–Tanner method
A method to determine the electrical conductance of thin films such as a‐Si:H that does not require contacting electrodes is presented. This method, introduced by Sommer and Tanner, is based on measuring the phase shift of a capacitive transmission line. The lower detection limit for the geometry us...
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Veröffentlicht in: | Review of scientific instruments 1996-10, Vol.67 (10), p.3624-3626 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | A method to determine the electrical conductance of thin films such as a‐Si:H that does not require contacting electrodes is presented. This method, introduced by Sommer and Tanner, is based on measuring the phase shift of a capacitive transmission line. The lower detection limit for the geometry used here is 10−11 Ω−1, which makes it suitable to determine the photoconductivity of a‐Si:H thin films. The method shows reasonable agreement with classical conductance measurements using sputtered electrodes. |
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ISSN: | 0034-6748 1089-7623 |
DOI: | 10.1063/1.1147125 |