Piezoelectrically driven rotary stage for use in ultrahigh vacuum
We have developed a compact high‐precision rotary stage for use in ultrahigh vacuum. Its drive mechanism incorporates along its circumference two sets of diametrically opposed piezoelectric devices with combined clamping and pushing action. The maximum torque load is 0.7 Nm. The rotation is bidirect...
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| Veröffentlicht in: | Review of scientific instruments 1996-05, Vol.67 (5), p.1930-1934 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | We have developed a compact high‐precision rotary stage for use in ultrahigh vacuum. Its drive mechanism incorporates along its circumference two sets of diametrically opposed piezoelectric devices with combined clamping and pushing action. The maximum torque load is 0.7 Nm. The rotation is bidirectional over 360° and proceeds in steps down to 1 mdeg at a maximum speed of one revolution per 2 min. |
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| ISSN: | 0034-6748 1089-7623 |
| DOI: | 10.1063/1.1146999 |