High‐temperature uniaxial stress apparatus for semiconductor defect symmetry determination
A mechanical apparatus designed for use in deep level transient spectroscopy (DLTS) experiments and capable of applying more than 5 GPa pressure to a semiconductor crystal sample at temperatures from 300–450 K is described. This compound lever system applies a temperature‐independent stress to the s...
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Veröffentlicht in: | Review of scientific instruments 1993-01, Vol.64 (1), p.221-224 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | A mechanical apparatus designed for use in deep level transient spectroscopy (DLTS) experiments and capable of applying more than 5 GPa pressure to a semiconductor crystal sample at temperatures from 300–450 K is described. This compound lever system applies a temperature‐independent stress to the sample throughout the temperature range of interest. As an illustration of this device’s application, the initial result of a uniaxial stress DLTS experiment on EL2 in n‐GaAs is given. EL2 is found to split under the [100] uniaxial stress, denying the AsGa and AsGa–As
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ISSN: | 0034-6748 1089-7623 |
DOI: | 10.1063/1.1144439 |