Coherence measurement technique for short‐wavelength light sources

This paper proposes and analyzes a technique that will allow the spatial coherence properties of short‐wavelength radiation sources to be measured. The technique is based on the analysis of the partially coherent diffraction patterns produced by a uniformly redundant array.

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Bibliographische Detailangaben
Veröffentlicht in:	Review of scientific instruments 1992-04, Vol.63 (4), p.2146-2151
Hauptverfasser:	Nugent, K. A., Trebes, J. E.
Format:	Artikel
Sprache:	eng
Schlagworte:	440600 - Optical Instrumentation- (1990-) 661100 - Classical & Quantum Mechanics- (1992-) CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS COHERENT RADIATION COHERENT SCATTERING DIFFRACTION ELECTROMAGNETIC RADIATION EXTREME ULTRAVIOLET RADIATION INTERFEROMETRY IONIZING RADIATIONS LAWRENCE LIVERMORE LABORATORY LIGHT SOURCES NATIONAL ORGANIZATIONS OTHER INSTRUMENTATION RADIATION SOURCES RADIATIONS SCATTERING SOFT X RADIATION ULTRAVIOLET RADIATION US AEC US DOE US ERDA US ORGANIZATIONS X RADIATION
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Beschreibung
Zusammenfassung:	This paper proposes and analyzes a technique that will allow the spatial coherence properties of short‐wavelength radiation sources to be measured. The technique is based on the analysis of the partially coherent diffraction patterns produced by a uniformly redundant array.
ISSN:	0034-6748 1089-7623
DOI:	10.1063/1.1143130