Apparatus for characterizing the VUV and soft x‐ray optical elements at the Photon Factory

Apparatus for characterizing the VUV and soft x‐ray optical elements at the Photon Factory

An apparatus dedicated to characterizing the VUV and soft x‐ray optical elements was fabricated, and a preliminary test on its performance was made in the soft x‐ray region with a grasshopper monochromator at the Photon Factory. The results demonstrated that quantitative evaluation of diffraction ef...

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Veröffentlicht in:Review of Scientific Instruments 1989-07, Vol.60 (7), p.2216-2218
Hauptverfasser: Mitani, Shichiro, Namioka, Takeshi, Yanagihara, Mihiro, Yamashita, Kojun, Fujita, Junji, Morita, Shigeru, Harada, Tatsuo, Sasaki, Taizo, Sato, Shigeru, Miyahara, Tsuneaki, Koide, Tsuneharu, Mikuni, Akira, Okamoto, Wataru, Maezawa, Hideki
Format: Artikel
Sprache:eng
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Zusammenfassung:An apparatus dedicated to characterizing the VUV and soft x‐ray optical elements was fabricated, and a preliminary test on its performance was made in the soft x‐ray region with a grasshopper monochromator at the Photon Factory. The results demonstrated that quantitative evaluation of diffraction efficiency of a grating could be easily performed using the apparatus.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1140773