Piezodriven 50‐μm range stage with subnanometer resolution
A micropositioning stage has been developed for use with optical and electron microscopes in the accurate measurement of fine lines used by the microelectronics industry and microscopic objects such as biological cells, air pollution particles, and asbestos fibers. The stage combines a piezoelectric...
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| Veröffentlicht in: | Review of scientific instruments 1978-12, Vol.49 (12), p.1735-1740 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | A micropositioning stage has been developed for use with optical and electron microscopes in the accurate measurement of fine lines used by the microelectronics industry and microscopic objects such as biological cells, air pollution particles, and asbestos fibers. The stage combines a piezoelectric driving element and flexure pivoted lever arms to achieve a compact, vacuum compatible device with a resolution of 0.001 μm or less over a range of 50 μm. |
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| ISSN: | 0034-6748 1089-7623 |
| DOI: | 10.1063/1.1135327 |