Enhanced piezocapacitive response in zinc oxide tetrapod-poly(dimethylsiloxane) composite dielectric layer for flexible and ultrasensitive pressure sensor

We demonstrate polymeric piezocapacitive pressure sensors based on a novel composite dielectric film of poly(dimethylsiloxane) elastomeric silicone and zinc oxide tetrapod. With an appropriate loading of zinc oxide tetrapods, composite piezocapacitive pressure sensors show a 75-fold enhancement of p...

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Veröffentlicht in:Nanoscale 2021-03, Vol.13 (12), p.676-686
Hauptverfasser: Hsieh, Gen-Wen, Ling, Shih-Rong, Hung, Fan-Ting, Kao, Pei-Hsiu, Liu, Jian-Bin
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Sprache:eng
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Zusammenfassung:We demonstrate polymeric piezocapacitive pressure sensors based on a novel composite dielectric film of poly(dimethylsiloxane) elastomeric silicone and zinc oxide tetrapod. With an appropriate loading of zinc oxide tetrapods, composite piezocapacitive pressure sensors show a 75-fold enhancement of pressure sensitivity over pristine devices, achieving a marked value as high as 2.55 kPa −1 . The limit of detection was estimated to be about 10 mg, corresponding to a subtle stimulus of only 1.0 Pa. Besides, versatile functionalities such as detection of finger bending/straightening, calligraphy writing, and air flow blowing have been investigated. It is expected that the proposed piezocapacitive pressure sensors incorporating stress-sensitive additives of zinc oxide nanostructures may provide a promising means for potential applications in ultrasensitive wearable, healthcare systems and human-machine interfaces. Zinc oxide tetrapod is introduced for the first time within a poly(dimethylsiloxane) dielectric matrix for the formation of ultrasensitive piezocapacitive pressure sensors.
ISSN:2040-3364
2040-3372
DOI:10.1039/d0nr06743a