Construction of 3D Si@Ti@TiN thin film arrays for aqueous symmetric supercapacitors

We report the preparation of 3D binder-free Si@Ti@TiN thin film array electrodes for supercapacitors using deep silicon etching and magnetron sputtering for the first time. This work not only offers the 3D array structure of Si@Ti@TiN thin films, but also paves a promising way for the construction of high-energy storage systems. This work presents a general strategy to produce 3D array electrode structures based on transition metal nitrides that otherwise are much more difficult to directly prepare by conventional routes and further to enhance their electrochemical performance for supercapacitors.