Very large scale characterization of graphene mechanical devices using a colorimetry techniqueElectronic supplementary information (ESI) available: Fabrication of SLG and DLG drumheads, colorimetry technique, derivation of the expression for adhesion energy, Raman spectroscopy of suspended and collapsed DLG drumheads, theoretical limit of large-diameter drums before collapse, stuck drums and the diameter-dependence of their occurrence probability, complete dataset of yield for SLG and DLG sample

We use a scalable optical technique to characterize more than 21 000 circular nanomechanical devices made of suspended single- and double-layer graphene on cavities with different diameters ( D ) and depths ( g ). To maximize the contrast between suspended and broken membranes we used a model for selecting the optimal color filter. The method enables parallel and automatized image processing for yield statistics. We find the survival probability to be correlated with a structural mechanics scaling parameter given by D 4 / g 3 . Moreover, we extract a median adhesion energy of Γ = 0.9 J m −2 between the membrane and the native SiO 2 at the bottom of the cavities. We use a scalable optical technique to characterize more than 21 000 circular nanomechanical devices made of suspended single- and double-layer graphene on cavities with different diameters ( D ) and depths ( g ).