Combining Freestanding Ferroelectric Perovskite Oxides with Two-Dimensional Semiconductors for High Performance Transistors

We demonstrate the fabrication of field-effect transistors based on single-layer MoS2 and a thin layer of BaTiO3 (BTO) dielectric, isolated from its parent epitaxial template substrate. Thin BTO provides an ultrahigh-κ gate dielectric effectively screening Coulomb scattering centers. These devices s...

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Veröffentlicht in:Nano letters 2022-09, Vol.22 (18), p.7457-7466
Hauptverfasser: Puebla, Sergio, Pucher, Thomas, Rouco, Victor, Sanchez-Santolino, Gabriel, Xie, Yong, Zamora, Victor, Cuellar, Fabian A., Mompean, Federico J., Leon, Carlos, Island, Joshua O., Garcia-Hernandez, Mar, Santamaria, Jacobo, Munuera, Carmen, Castellanos-Gomez, Andres
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Sprache:eng
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Zusammenfassung:We demonstrate the fabrication of field-effect transistors based on single-layer MoS2 and a thin layer of BaTiO3 (BTO) dielectric, isolated from its parent epitaxial template substrate. Thin BTO provides an ultrahigh-κ gate dielectric effectively screening Coulomb scattering centers. These devices show mobilities substantially larger than those obtained with standard SiO2 dielectrics and comparable with values obtained with hexagonal boron nitride, a dielectric employed for fabrication of high-performance two-dimensional (2D) based devices. Moreover, the ferroelectric character of BTO induces a robust hysteresis of the current vs gate voltage characteristics, attributed to its polarization switching. This hysteresis is strongly suppressed when the device is warmed up above the tetragonal-to-cubic transition temperature of BTO that leads to a ferroelectric-to-paraelectric transition. This hysteretic behavior is attractive for applications in memory storage devices. Our results open the door to the integration of a large family of complex oxides exhibiting strongly correlated physics in 2D-based devices.
ISSN:1530-6984
1530-6992
DOI:10.1021/acs.nanolett.2c02395