Aerosol-jet-printed, conformable microfluidic force sensors

Force sensors that are thin, low-cost, flexible, and compatible with commercial microelectronic chips are of great interest for use in biomedical sensing, precision surgery, and robotics. By leveraging a combination of microfluidics and capacitive sensing, we develop a thin, flexible force sensor that is conformable and robust. The sensor consists of a partially filled microfluidic channel made from a deformable material, with the channel overlaying a series of interdigitated electrodes coated with a thin, insulating polymer layer. When a force is applied to the microfluidic channel reservoir, the fluid is displaced along the channel over the electrodes, thus inducing a capacitance change proportional to the applied force. The microfluidic molds themselves are made of low-cost sacrificial materials deposited via aerosol-jet printing, which is also used to print the electrode layer. We envisage a large range of industrial and biomedical applications for this force sensor. [Display omitted] Highly flexible, capacitive force sensors based on microfluidicsLinear capacitance response to applied forceRapid prototyping of low-cost and robust force sensors via aerosol-jet printingTunable design for various sensitivities and force measurement ranges Jing et al. report a thin, conformable force sensor based on a combination of microfluidics and capacitive sensing. The low-cost sensor is fabricated via aerosol-jet printing and shows a highly linear response with adjustable design parameters for tunable sensitivities and force ranges.