High-performance thermochromic VO2-based coatings with a low transition temperature deposited on glass by a scalable technique
We report on high-performance thermochromic ZrO 2 /V 0.982 W 0.018 O 2 /ZrO 2 coatings with a low transition temperature prepared on glass by a low-temperature scalable deposition technique. The V 0.982 W 0.018 O 2 layers were deposited by a controlled high-power impulse magnetron sputtering of V ta...
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| Veröffentlicht in: | Scientific reports 2020-07, Vol.10 (1), p.11107-11107, Article 11107 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | We report on high-performance thermochromic ZrO
2
/V
0.982
W
0.018
O
2
/ZrO
2
coatings with a low transition temperature prepared on glass by a low-temperature scalable deposition technique. The V
0.982
W
0.018
O
2
layers were deposited by a controlled high-power impulse magnetron sputtering of V target, combined with a simultaneous pulsed DC magnetron sputtering of W target to reduce the transition temperature to 20–21 °C, at a low substrate surface temperature of 330 °C in an argon–oxygen gas mixture. ZrO
2
antireflection layers both below and above the thermochromic V
0.982
W
0.018
O
2
layers were deposited at a low substrate temperature ( |
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| ISSN: | 2045-2322 2045-2322 |
| DOI: | 10.1038/s41598-020-68002-5 |