Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System

Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System

Ag-ZnO co-sputtered films at various atomic ratios of Ag (Ag/(Ag + Zn) at.%) were prepared by a radio frequency magnetron cosputtering system, using the co-sputtered targets of Ag and ZnO. The activation of the Ag acceptors (Ag ) and the formation of the Ag aggregations (Ag⁰) in the ZnO matrix were...

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Veröffentlicht in:Materials 2017-07, Vol.10 (7), p.797
Hauptverfasser: Liu, Fang-Cheng, Li, Jyun-Yong, Chen, Tai-Hong, Chang, Chun-How, Lee, Ching-Ting, Hsiao, Wei-Hua, Liu, Day-Shan
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Sprache:eng
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Zusammenfassung:Ag-ZnO co-sputtered films at various atomic ratios of Ag (Ag/(Ag + Zn) at.%) were prepared by a radio frequency magnetron cosputtering system, using the co-sputtered targets of Ag and ZnO. The activation of the Ag acceptors (Ag ) and the formation of the Ag aggregations (Ag⁰) in the ZnO matrix were investigated from XRD, Raman scattering, and XPS measurements. The Ag-ZnO co-sputtered film behaving like a -type conduction was achievable after annealing at 350 °C under air ambient for 1 h.
ISSN:1996-1944
1996-1944
DOI:10.3390/ma10070797