A New Strategy of Lithography Based on Phase Separation of Polymer Blends

Herein, we propose a new strategy of maskless lithographic approach to fabricate micro/nano-porous structures by phase separation of polystyrene (PS)/Polyethylene glycol (PEG) immiscible polymer blend. Its simple process only involves a spin coating of polymer blend followed by a development with de...

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Veröffentlicht in:	Scientific reports 2015-10, Vol.5 (1), p.15947, Article 15947
Hauptverfasser:	Guo, Xu, Liu, Long, Zhuang, Zhe, Chen, Xin, Ni, Mengyang, Li, Yang, Cui, Yushuang, Zhan, Peng, Yuan, Changsheng, Ge, Haixiong, Wang, Zhenlin, Chen, Yanfeng
Format:	Artikel
Sprache:	eng
Schlagworte:	140/133 639/766/25 639/925/927 639/925/930 Humanities and Social Sciences multidisciplinary Science
Online-Zugang:	Volltext
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