Microstructure and optical properties of Ag/ITO/Ag multilayer films

Transflective and highly conductive Ag/ITO/Ag multilayer films were prepared by magnetron sputtering on glass substrates. The microstructure and optical properties of Ag/ITO/Ag multilayer films were systematically investigated by X-ray diffraction, scanning electron microscopy, and ultraviolet-visib...

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Veröffentlicht in:	Nanoscale research letters 2013-10, Vol.8 (1), p.424-424, Article 424
Hauptverfasser:	Sun, Zhaoqi, Zhang, Maocui, Xia, Qiping, He, Gang, Song, Xueping
Format:	Artikel
Sprache:	eng
Schlagworte:	13th Trends in NanoTechnology International Conference Chemistry and Materials Science Materials Science Molecular Medicine Nano Express Nanochemistry Nanoscale Science and Technology Nanotechnology Nanotechnology and Microengineering
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Beschreibung
Zusammenfassung:	Transflective and highly conductive Ag/ITO/Ag multilayer films were prepared by magnetron sputtering on glass substrates. The microstructure and optical properties of Ag/ITO/Ag multilayer films were systematically investigated by X-ray diffraction, scanning electron microscopy, and ultraviolet-visible spectroscopy. The optical properties of the multilayer films were significantly influenced by the thickness of the Ag surface layer from 3.0 to 12.6 nm. The multilayer film of Ag9.3nm/ITO142nm/Ag9.3nm shows the best comprehensive property. It could satisfy the requirement for transflective LCD.
ISSN:	1931-7573 1556-276X 1556-276X
DOI:	10.1186/1556-276X-8-424