Patterning and nanoribbon formation in graphene by hot punching
Large area graphene patterning is critical for applications. Current graphene patterning techniques, such as electron beam lithography (EBL) and nano imprint lithography (NIL), are time consuming and can scale unfavourably with sample size. Resist-based masking and subsequent dry plasma etching can...
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Veröffentlicht in: | Nanotechnology 2024-12 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Large area graphene patterning is critical for applications. Current graphene patterning techniques, such as electron beam lithography (EBL) and nano imprint lithography (NIL), are time consuming and can scale unfavourably with sample size. Resist-based masking and subsequent dry plasma etching can lead to high roughness edges with no alignment to the underlying graphene crystal orientations. In this study, we present hot punching as a novel and feasible method for patterning of CVD graphene sheets supported by a PVA layer. Additionally, we observe the effect of such hot punching on graphene supported by PVA via optical microscopy, Raman spectroscopy, AFM, and TEM, including wrinkling, strain and the formation of nanoribbons with crystallographically aligned and smooth edges due to fracturing. We present hot punching as a facile technique for the production of arrays of such nanoribbons.
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ISSN: | 0957-4484 1361-6528 1361-6528 |
DOI: | 10.1088/1361-6528/ad9d4c |