Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO 3 Thin Film
This article presents lithium niobate (LiNbO ) based on shear horizontal (SH0) resonators, utilizing a suspended structure, for radio frequency (RF) applications. It demonstrates the design, analysis, and fabrication of SH0 resonators based on a 36Y-cut LiNbO thin film. The spurious-free SH0 resonat...
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| Veröffentlicht in: | Micromachines (Basel) 2024-03, Vol.15 (4) |
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| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | This article presents lithium niobate (LiNbO
) based on shear horizontal (SH0) resonators, utilizing a suspended structure, for radio frequency (RF) applications. It demonstrates the design, analysis, and fabrication of SH0 resonators based on a 36Y-cut LiNbO
thin film. The spurious-free SH0 resonator achieves an electromechanical coupling coefficient (kt2) of 42.67% and a quality factor (Q
) of 254 at the wave-propagating orientation of 0° in the 36Y-cut plane. |
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| ISSN: | 2072-666X 2072-666X |