Transparent and conducting boron doped ZnO thin films grown by aerosol assisted chemical vapor deposition

ZnO based transparent conducting oxides are important as they provide an alternative to the more expensive Sn : In 2 O 3 that currently dominates the industry. Here, we investigate B-doped ZnO thin films grown via aerosol assisted chemical vapour deposition. B : ZnO films were produced from zinc acetate and triethylborane using either tetrahydrofuran or methanol (MeOH) as the solvent. The lowest resistivity of 5.1 × 10 −3 Ω cm along with a visible light transmittance of ∼75-80% was achieved when using MeOH as the solvent. XRD analysis only detected the wurtzite phase of ZnO suggesting successful solid solution formation with B 3+ substituting Zn 2+ sites in the lattice. Refinement of the XRD patterns showed minimal distortion to the ZnO unit cell upon doping when MeOH was the solvent due to the immiscibility of the [BEt 3 ] solution (1.0 M solution in hexane) in methanol that limited the amount of B going into the films, thus preventing excessive doping. Boron doped zinc oxide thin films via aerosol assisted chemical vapor deposition with resisitivities as low as 5.1 × 10 −3 Ω cm.