Effects of pH Values and H 2 O 2 Concentrations on the Chemical Enhanced Shear Dilatancy Polishing of Tungsten

In order to obtain tungsten with great surface qualities and high polishing efficiency, a novel method of chemical enhanced shear dilatancy polishing (C-SDP) was proposed. The effects of pH values and H O concentrations on the polishing performance of tungsten C-SDP were studied. In addition, the co...

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Veröffentlicht in:	Micromachines (Basel) 2022-05, Vol.13 (5)
Hauptverfasser:	Xu, Liang, Wang, Lin, Chen, Hongyu, Wang, Xu, Chen, Fangyuan, Lyu, Binghai, Hang, Wei, Zhao, Wenhong, Yuan, Julong
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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