Impact of electrode geometry and thickness on planar on-chip microsupercapacitors

We report an assessment of the influence of both finger geometry and vertically-oriented carbon nanofiber lengths in planar micro-supercapacitors. Increasing the finger number leads to an up-scaling in areal power densities, which increases with scan rate. Growing the nanofibers longer, however, does not lead to a proportional growth in capacitance, proposedly related to limited ion penetration of the electrode. We present an in-depth analysis of the impact of geometry and carbon nanofiber thickness on CMOS compatible microsupercapacitor performance.