A Multilayer MEMS Platform for Single-Cell Electric Impedance Spectroscopy and Electrochemical Analysis

The fabrication and characterization of a micro- chamber electrode array for electrical and electrochemical studies of individual biological cells are presented. The geometry was tailored specifically for measurements from sensory hair cells isolated from the cochlea of the mammalian inner ear. Conv...

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Veröffentlicht in:Journal of microelectromechanical systems 2008-08, Vol.17 (4), p.850-862
Hauptverfasser: Dittami, Gregory M., Ayliffe, H. Edward, King, Curtis S., Rabbitt, Richard D.
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Sprache:eng
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