An undercutting model of atomic oxygen for multilayer silica/alumina films fabricated by plasma immersion implantation and deposition on polyimide

► The undercutting model of polymer covered with protective film induced by AO was defined. ► The AO erosion mechanism of polyimide has been investigated using a ground-based AO simulator and Monte Carlo model. ► AO erosion predictions at two neighborhood cracks is first studied by Monte Carlo model...

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Veröffentlicht in:	Applied surface science 2011-08, Vol.257 (21), p.9158-9163
Hauptverfasser:	Huang, Yongxian, Tian, Xiubo, Lv, Shixiong, Yang, Shiqin, Fu, R.K.Y., Chu, Paul K., Leng, Jinsong, Li, Yao
Format:	Artikel
Sprache:	eng
Schlagworte:	Computer simulation Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Erosion Exact sciences and technology Mathematical models Monte Carlo Monte Carlo methods Multilayer thin films Multilayers Physics Plasma immersion Polymer Protective Protective coatings Silicon dioxide
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