hydrogen gas sensor employing vertically aligned TiO₂ nanotube arrays prepared by template-assisted method

Vertically aligned TiO₂ nanotube arrays for H₂ gas sensor were fabricated by using atomic layer deposition combined with anodic aluminum oxide template. Morphology and crystalline structure of the TiO₂ nanotubes were characterized, and gas sensing properties at low temperatures (

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Veröffentlicht in:Sensors and actuators. B, Chemical Chemical, 2011-12, Vol.160 (1), p.1494-1498
Hauptverfasser: Lee, Jiwon, Kim, Dai Hong, Hong, Seong-Hyeon, Jho, Jae Young
Format: Artikel
Sprache:eng
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Zusammenfassung:Vertically aligned TiO₂ nanotube arrays for H₂ gas sensor were fabricated by using atomic layer deposition combined with anodic aluminum oxide template. Morphology and crystalline structure of the TiO₂ nanotubes were characterized, and gas sensing properties at low temperatures (
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2011.08.001