hydrogen gas sensor employing vertically aligned TiO₂ nanotube arrays prepared by template-assisted method
Vertically aligned TiO₂ nanotube arrays for H₂ gas sensor were fabricated by using atomic layer deposition combined with anodic aluminum oxide template. Morphology and crystalline structure of the TiO₂ nanotubes were characterized, and gas sensing properties at low temperatures (
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Veröffentlicht in: | Sensors and actuators. B, Chemical Chemical, 2011-12, Vol.160 (1), p.1494-1498 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Vertically aligned TiO₂ nanotube arrays for H₂ gas sensor were fabricated by using atomic layer deposition combined with anodic aluminum oxide template. Morphology and crystalline structure of the TiO₂ nanotubes were characterized, and gas sensing properties at low temperatures ( |
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ISSN: | 0925-4005 1873-3077 |
DOI: | 10.1016/j.snb.2011.08.001 |