A facile route to patterned epitaxial ZnO nanostructures by soft lithography

A facile route to patterned epitaxial ZnO nanostructures by soft lithography

Combining two robust, facile, and low cost techniques-nanoimprint lithography and low temperature aqueous solution phase epitaxy of ZnO-enabled the fabrication of nanostructured single crystal surfaces. Various patterns were fabricated with sub-micron resolution, including an array of 70 nm diameter...

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Veröffentlicht in:Journal of materials chemistry 2011-01, Vol.21 (38), p.14417-14419
Hauptverfasser: Richardson, Jacob J., Estrada, Daniel, DenBaars, Steven P., Hawker, Craig J., Campos, Luis M.
Format: Artikel
Sprache:eng
Schlagworte:
Aqueous solutions
Arrays
Epitaxy
Lithography
Low cost
Nanocomposites
Nanomaterials
Nanostructure
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Beschreibung
Zusammenfassung:Combining two robust, facile, and low cost techniques-nanoimprint lithography and low temperature aqueous solution phase epitaxy of ZnO-enabled the fabrication of nanostructured single crystal surfaces. Various patterns were fabricated with sub-micron resolution, including an array of 70 nm diameter posts. The method requires no vacuum equipment and has a maximum process temperature of 110 [degree]C.
ISSN:0959-9428
1364-5501
DOI:10.1039/c1jm13167b