Hydrogen plasma interaction with (100) diamond surfaces

Hydrogen plasma interaction with (100) diamond surfaces

Polycrystalline diamond films exhibiting (100) oriented surfaces have been subject to a low pressure hydrogen plasma for durations up to 20 h. The topography of spatially defined 20 × 20 μm areas of the samples were imaged by atomic force microscopy at intervals during the plasma exposure. The mean...

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Veröffentlicht in:Physical chemistry chemical physics : PCCP 2011-06, Vol.13 (24), p.11503-11510
Hauptverfasser: John, Phillip, Stoikou, Maria D
Format: Artikel
Sprache:eng
Schlagworte:
Carbonyls
Crystallites
Etching
Ethers
Fittings
Hydrogen plasma
Topography
X-ray photoelectron spectroscopy
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Zusammenfassung:Polycrystalline diamond films exhibiting (100) oriented surfaces have been subject to a low pressure hydrogen plasma for durations up to 20 h. The topography of spatially defined 20 × 20 μm areas of the samples were imaged by atomic force microscopy at intervals during the plasma exposure. The mean surface roughness of individual (100) crystallites decreased from ca. 2.4 nm to
ISSN:1463-9076
1463-9084
DOI:10.1039/c1cp20099b