A Z-Axis Decoupled Micromachined Gyroscope with Dual Frames

A Z-Axis Decoupled Micromachined Gyroscope with Dual Frames

A z-axis decoupled micromachined gyroscope with dual frames is designed, fabricated and tested. The robust structure considering fabrication errors is obtained by the use of optimal robustness of design and process compensation. The gyroscope is packaged in vacuum, and test results show that quality...

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Veröffentlicht in:Key engineering materials 2011-01, Vol.483, p.169-173
Hauptverfasser: Liu, Xian Xue, Zhou, Hao, Tang, Hai Lin
Format: Artikel
Sprache:eng
Schlagworte:
Frames
Gyroscopes
Linearity
Micromachining
Micromechanics
Optimization
Quality factor
Robustness
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Zusammenfassung:A z-axis decoupled micromachined gyroscope with dual frames is designed, fabricated and tested. The robust structure considering fabrication errors is obtained by the use of optimal robustness of design and process compensation. The gyroscope is packaged in vacuum, and test results show that quality factor of driving and sensing modes are 2000 and 800, respectively. In the range of 0~2400 deg/sec, sensitivity and linearity of the fabricated gyroscope are 1 deg/sec and 0.3%, respectively.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.483.169