Microminiature Hall Probes for Applications at Pulsed Magnetic Fields up to 87 Tesla

Microminiature Hall probes (MHP) may be used as magnetic field transducers, with virtually no change of sensitivity with temperature, for applications at room and cryogenic temperatures. The probes have a nominal active sensing area from 90×90 μm down to 20×20 μm and are based on Sn-doped n-InSb/i-GaAs MBE-grown heterostructures. MHPs were intensively tested in static (up to 14 T) and pulsed magnetic fields and shown to be appropriate for various applications in the temperature range 2–300 K and in pulsed magnetic fields up to 87 T. The latest version of these probes, with overall cross-section thickness-width dimensions of 150×750 μm, are the smallest encapsulated Hall probes currently available and can be placed in areas not previously accessible to commercial packaged or unpackaged sensors.