Dynamics of the surface composition and structure of InP oxidized in the presence of V and V2O5

Structure of the surface layers of V 2 O 5 (20, 38 nm)/InO and V(25, 15 nm)/InP heterostructures, including surface morphology, distributions of elements over the oxidized-layer thickness, phase composition, and the interface quality, are studied both before and after oxidation. According to the Auger-and IR-spectroscopy data, the layers obtained as a result of the oxidation are mainly indium phosphates and vanadates with nonuniform distributions of elements over the oxide-film thickness. Results describing the kinetics of heterostructure oxidation are obtained. The solid-phase diffusion of the substrate components is shown to be the governing process. This implies that the considered process is catalytic. The reaction rate is weakly dependent on the catalyst amount.