Fabrication of 2D photonic crystal assisted Y2O3:Eu3+ thin-film phosphors by direct nano-imprinting

The effect of a two-dimensional Y2O3:Eu3+ photonic crystal (PC) pattern on the extraction efficiency of photoluminescence from the underlying Y2O3:Eu3+ thin-film phosphor was investigated. The photonic crystal structure was fabricated using a direct nano-imprint process with a Pechini-type Y2O3:Eu3+...

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Veröffentlicht in:Microelectronic engineering 2011-09, Vol.88 (9), p.2930-2933
Hauptverfasser: KO, Ki-Young, HER, Eun-Jin, NICHOLS, William T, LEE, Heon, YOUNG RAG DO, AHN, Jinho
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Sprache:eng
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Zusammenfassung:The effect of a two-dimensional Y2O3:Eu3+ photonic crystal (PC) pattern on the extraction efficiency of photoluminescence from the underlying Y2O3:Eu3+ thin-film phosphor was investigated. The photonic crystal structure was fabricated using a direct nano-imprint process with a Pechini-type Y2O3:Eu3+ sol as the nano-imprint resin and a patterned polydimethylsiloxane (PDMS) stamp as the mould. The elevated pressure and temperature of the nano-imprinting process converted the Y2O3:Eu3+ sol into a Y2O3:Eu3+ gel resulting in high definition transfer of the 2D patterns of the master template into the gel on top of the Y2O3:Eu3+ thin-film phosphor layer. The extraction efficiency of the 2D Y2O3:Eu3+ gel PC-assisted Y2O3:Eu3+ thin-film phosphor was approximately 3.7 times higher than a non-PC Y2O3:Eu3+ gel coated Y2O3:Eu3+ thin-film phosphor.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2011.03.162