Properties of r.f. sputtered cadmium telluride thin films

CdTe thin films were prepared using RF magnetron sputtering in an Ar atmosphere. Substrate temperatures in the range 100-320 C were used. XRD results showed that the films are amorphous below 200 C while above 200 C the firms were polycrystalline with cubic structure and grains preferentially orient...

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Veröffentlicht in:	Journal of materials science. Materials in electronics 2003, Vol.14 (1), p.21-26
Hauptverfasser:	MARAFI, M, EL AKKAD, F, PRADEEP, B
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Band spectra Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Crystal defects Deposition by sputtering Energy transmission Energy use Exact sciences and technology Grain size Ii-vi semiconductors Impurities Magnetron sputtering Materials science Methods of deposition of films and coatings film growth and epitaxy Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Physics Solar energy Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Thin films
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