Properties of r.f. sputtered cadmium telluride thin films

CdTe thin films were prepared using RF magnetron sputtering in an Ar atmosphere. Substrate temperatures in the range 100-320 C were used. XRD results showed that the films are amorphous below 200 C while above 200 C the firms were polycrystalline with cubic structure and grains preferentially orient...

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Veröffentlicht in:Journal of materials science. Materials in electronics 2003, Vol.14 (1), p.21-26
Hauptverfasser: MARAFI, M, EL AKKAD, F, PRADEEP, B
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EL AKKAD, F
PRADEEP, B
description CdTe thin films were prepared using RF magnetron sputtering in an Ar atmosphere. Substrate temperatures in the range 100-320 C were used. XRD results showed that the films are amorphous below 200 C while above 200 C the firms were polycrystalline with cubic structure and grains preferentially oriented along the [1 1 1] crystallographic direction. SEM measurements showed significant enhancement of crystallite size with increase of T(s) or with post-preparation annealing above 400 C. The 5 K photoluminescence spectrum showed a broad (FWHM = 80 meV) band with a maximum at 1.538 eV. This band showed significant narrowing after annealing above 400 C, suggesting that it originates from transitions involving grain boundary defects. The refractive index n was determined from the interference pattern of the optical transmission. The results agree with the values of n calculated using the Jensen theory.
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subjects Annealing
Band spectra
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Crystal defects
Deposition by sputtering
Energy transmission
Energy use
Exact sciences and technology
Grain size
Ii-vi semiconductors
Impurities
Magnetron sputtering
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Physics
Solar energy
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Thin films
title Properties of r.f. sputtered cadmium telluride thin films
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