RF VCO tuning using MEMS piezoelectric actuated variable inductors

This paper presents a study on the use of microsystems technology in the design of radio frequency voltage-controlled oscillators. In particular, the application of a micro-electro-mechanical systems (MEMS) based variable inductor for frequency tuning purposes is presented. Although traditionally a MEMS variable inductor is considered as a means to extend the tuning range, in this work it is shown that with correct inductor design it is also possible to facilitate and improve the voltage-controlled oscillator design in terms of phase noise response and power consumption in comparison to a design based on standard capacitive tuning.