Hybrid ring coupler for W-band MMIC applications using MEMS technology

The hybrid ring coupler was designed and fabricated on a GaAs substrate using surface micromachining techniques, which adopted dielectric-supported air-gapped microstrip line (DAML) structure. The fabrication process of DAML is compatible with the standard monolithic microwave integrated circuit (MM...

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Veröffentlicht in:	IEEE microwave and wireless components letters 2005-10, Vol.15 (10), p.652-654
Hauptverfasser:	Sung-Chan Kim, Baek-Seok Ko, Tae-Jong Baek, Byeong-Ok Lim, An, D., Dong-Hoon Shin, Jin-Koo Rhee
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Coupling circuits Dielectric substrates Dielectric-supported air-gapped line (DAML) Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Fabrication Frequency ranges Gallium arsenide hybrid ring coupler Integrated circuit technology Joining Micro- and nanoelectromechanical devices (mems/nems) microelectromechanical systems (MEMS) Microelectronic fabrication (materials and surfaces technology) Micromachining Micromechanical devices Microstrip Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Microwaves MMICs monolithic microwave integrated circuit (MMIC) Propagation losses Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Transmission loss Wideband
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Beschreibung
Zusammenfassung:	The hybrid ring coupler was designed and fabricated on a GaAs substrate using surface micromachining techniques, which adopted dielectric-supported air-gapped microstrip line (DAML) structure. The fabrication process of DAML is compatible with the standard monolithic microwave integrated circuit (MMIC) techniques, and the hybrid ring coupler can be simply integrated into a plane-structural MMIC. The fabricated hybrid ring coupler shows wideband characteristics of the coupling loss of 3.57 /spl plusmn/ 0.22dB and the transmission loss of 3.80 /spl plusmn/ 0.08dB across the measured frequency range of 85 to 105GHz. The isolation characteristics and output phase differences are -34dB and 180/spl plusmn/1/spl deg/, at 94GHz, respectively.
ISSN:	1531-1309 2771-957X 1558-1764 2771-9588
DOI:	10.1109/LMWC.2005.856684