Assessment of techniques for characterizing the surface quality of ground silicon nitride

This study evaluates techniques used to detect and quantify the extent of surface and subsurface damage in ground silicon nitride. Specimens of two differently ground surfaces of a hot isostatically pressed (HIP) silicon nitride, commercially designated as GS-44, were subjected to six types of analy...

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Veröffentlicht in:	Journal of Materials Engineering and Performance 1998-08, Vol.7 (4), p.533-547
Hauptverfasser:	ZANORIA, E. S, WATKINS, T. R, BREDER, K, RIESTER, L, BASHKANSKY, M, REINTJES, J, SUN, J. G, ELLINGSON, W, BLAU, P. J
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Atomic force microscopy Building materials. Ceramics. Glasses Ceramic industries Chemical industry and chemicals CORRELATIONS DAMAGE ENGINEERING NOT INCLUDED IN OTHER CATEGORIES Exact sciences and technology Fragmentation Gating and risering GRINDING Grounds Lasers MATERIALS SCIENCE MATERIALS TESTING MICROSCOPY ROUGHNESS Routines Scattering Silicon nitride SILICON NITRIDES Structural ceramics SURFACE PROPERTIES Technical ceramics X-RAY DIFFRACTION
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