Mass production of uniform-sized nanoporous silicon nanowire anodes via block copolymer lithography

We present a simple, mass production of nonporous and nanoporous silicon nanowire anodes by combining block copolymer masks and metal catalytic etching. Carbon coated nanoporous silicon nanowire anodes exhibit a highly stable cycling performance with a reversible charge capacity of 1500 mA h g-1.

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Veröffentlicht in:Energy & environmental science 2011-01, Vol.4 (9), p.3395-3399
Hauptverfasser: Bang, Byoung Man, Kim, Hyunjung, Lee, Jung-Pil, Cho, Jaephil, Park, Soojin
Format: Artikel
Sprache:eng
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Zusammenfassung:We present a simple, mass production of nonporous and nanoporous silicon nanowire anodes by combining block copolymer masks and metal catalytic etching. Carbon coated nanoporous silicon nanowire anodes exhibit a highly stable cycling performance with a reversible charge capacity of 1500 mA h g-1.
ISSN:1754-5692
1754-5706
DOI:10.1039/C1EE01898A