Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film
Issue Title: Special Issue: ICE-2005 International Conference on Electroceramics Lithium phosphorous oxynitride(Lipon) thin films as a lithium ion conductive electrolyte were prepared by radio frequency reactive sputtering in N^sub 2^ plasma. The properties of the amorphous Lipon solid electrolyte w...
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| Veröffentlicht in: | Journal of electroceramics 2006-12, Vol.17 (2-4), p.1023-1030 |
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| container_title | Journal of electroceramics |
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| creator | HO YOUNG PARK SANG CHEOL NAM YOUNG CHANG LIM KYU GIL CHOI KI CHANG LEE GI BACK PARK LEE, Seong-Rae HEESOOK PARK KIM SUNG BAEK CHO |
| description | Issue Title: Special Issue: ICE-2005 International Conference on Electroceramics Lithium phosphorous oxynitride(Lipon) thin films as a lithium ion conductive electrolyte were prepared by radio frequency reactive sputtering in N^sub 2^ plasma. The properties of the amorphous Lipon solid electrolyte were investigated as a function of N^sub 2^ pressure during reactive sputtering. The ionic conductivity and the electrochemical stability of Lipon thin films improved drastically as the N^sub 2^ pressure decreased. The ionic conductivity closed to 10^sup -6^ S cm^sup -1^ and obtained a stability window of 1.0-5.0 V with an N^sub 2^ pressure of 5 mTorr, where the number of nitrogen bonds between the phosphate groups were more than those formed at higher pressure. It was possible to fabricate the Li//LiCoO^sub 2^ complete thin film battery using this Lipon solid electrolyte, which exhibited excellent discharge characteristics close to the theoretical capacity (ca. 69 uAhcm^sup -2^-um^sup -1^) and showed a considerably high rate capability.[PUBLICATION ABSTRACT] |
| doi_str_mv | 10.1007/s10832-006-8976-3 |
| format | Article |
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The properties of the amorphous Lipon solid electrolyte were investigated as a function of N^sub 2^ pressure during reactive sputtering. The ionic conductivity and the electrochemical stability of Lipon thin films improved drastically as the N^sub 2^ pressure decreased. The ionic conductivity closed to 10^sup -6^ S cm^sup -1^ and obtained a stability window of 1.0-5.0 V with an N^sub 2^ pressure of 5 mTorr, where the number of nitrogen bonds between the phosphate groups were more than those formed at higher pressure. It was possible to fabricate the Li//LiCoO^sub 2^ complete thin film battery using this Lipon solid electrolyte, which exhibited excellent discharge characteristics close to the theoretical capacity (ca. 69 uAhcm^sup -2^-um^sup -1^) and showed a considerably high rate capability.[PUBLICATION ABSTRACT]</description><identifier>ISSN: 1385-3449</identifier><identifier>EISSN: 1573-8663</identifier><identifier>DOI: 10.1007/s10832-006-8976-3</identifier><identifier>CODEN: JOELFJ</identifier><language>eng</language><publisher>Heidelberg: Springer</publisher><subject>Applied sciences ; Battery ; Direct energy conversion and energy accumulation ; Electrical engineering. Electrical power engineering ; Electrical power engineering ; Electrochemical conversion: primary and secondary batteries, fuel cells ; Exact sciences and technology ; Ionic conductivity ; Lithium ; Oxynitrides ; Radio frequency ; Solid electrolytes ; Sputtering ; Stability ; Thin films</subject><ispartof>Journal of electroceramics, 2006-12, Vol.17 (2-4), p.1023-1030</ispartof><rights>2008 INIST-CNRS</rights><rights>Springer Science + Business Media, LLC 2006</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c431t-d1c1fb0cded9e75ed52a0ab504c162af86697e096cf83d6fa394ed4a64df94c3</citedby><cites>FETCH-LOGICAL-c431t-d1c1fb0cded9e75ed52a0ab504c162af86697e096cf83d6fa394ed4a64df94c3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>309,310,314,776,780,785,786,23909,23910,25118,27901,27902</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=18756541$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>HO YOUNG PARK</creatorcontrib><creatorcontrib>SANG CHEOL NAM</creatorcontrib><creatorcontrib>YOUNG CHANG LIM</creatorcontrib><creatorcontrib>KYU GIL CHOI</creatorcontrib><creatorcontrib>KI CHANG LEE</creatorcontrib><creatorcontrib>GI BACK PARK</creatorcontrib><creatorcontrib>LEE, Seong-Rae</creatorcontrib><creatorcontrib>HEESOOK PARK KIM</creatorcontrib><creatorcontrib>SUNG BAEK CHO</creatorcontrib><title>Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film</title><title>Journal of electroceramics</title><description>Issue Title: Special Issue: ICE-2005 International Conference on Electroceramics Lithium phosphorous oxynitride(Lipon) thin films as a lithium ion conductive electrolyte were prepared by radio frequency reactive sputtering in N^sub 2^ plasma. The properties of the amorphous Lipon solid electrolyte were investigated as a function of N^sub 2^ pressure during reactive sputtering. The ionic conductivity and the electrochemical stability of Lipon thin films improved drastically as the N^sub 2^ pressure decreased. The ionic conductivity closed to 10^sup -6^ S cm^sup -1^ and obtained a stability window of 1.0-5.0 V with an N^sub 2^ pressure of 5 mTorr, where the number of nitrogen bonds between the phosphate groups were more than those formed at higher pressure. It was possible to fabricate the Li//LiCoO^sub 2^ complete thin film battery using this Lipon solid electrolyte, which exhibited excellent discharge characteristics close to the theoretical capacity (ca. 69 uAhcm^sup -2^-um^sup -1^) and showed a considerably high rate capability.[PUBLICATION ABSTRACT]</description><subject>Applied sciences</subject><subject>Battery</subject><subject>Direct energy conversion and energy accumulation</subject><subject>Electrical engineering. Electrical power engineering</subject><subject>Electrical power engineering</subject><subject>Electrochemical conversion: primary and secondary batteries, fuel cells</subject><subject>Exact sciences and technology</subject><subject>Ionic conductivity</subject><subject>Lithium</subject><subject>Oxynitrides</subject><subject>Radio frequency</subject><subject>Solid electrolytes</subject><subject>Sputtering</subject><subject>Stability</subject><subject>Thin films</subject><issn>1385-3449</issn><issn>1573-8663</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNp9kU1LAzEQhhdRsFZ_gLdFUE-ryeZjk6OU-gGCl95DmkxsynZ3TbJi_72pFQUPHoYZZp55meEtinOMbjBCzW3ESJC6QohXQja8IgfFBLOGVIJzcphrIlhFKJXHxUmMa4SQFBRPio-5c2BSLHtXxmFMCYLvXsshQIxjgLLvyrSC0qx00GY3jMmbL7r1aeXHTekzYvrOjib5d_hpD6s-5gj9mOmPbedT8BaymO9K59vNaXHkdBvh7DtPi8X9fDF7rJ5fHp5md8-VoQSnymKD3RIZC1ZCw8CyWiO9ZIgazGvt8nuyASS5cYJY7jSRFCzVnFonqSHT4novO4T-bYSY1MZHA22rO8inKYkpZ1LUIpNX_5K1kExQITN48Qdc92Po8hNKCMwpoTXNEN5DJvQxBnBqCH6jw1ZhpHaOqb1jKjumdo4pkncuv4V1NLp1QXfGx99F0TDOKCaflpmZjA</recordid><startdate>20061201</startdate><enddate>20061201</enddate><creator>HO YOUNG PARK</creator><creator>SANG CHEOL NAM</creator><creator>YOUNG CHANG LIM</creator><creator>KYU GIL CHOI</creator><creator>KI CHANG LEE</creator><creator>GI BACK PARK</creator><creator>LEE, Seong-Rae</creator><creator>HEESOOK PARK KIM</creator><creator>SUNG BAEK CHO</creator><general>Springer</general><general>Springer Nature B.V</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>7SP</scope><scope>7SR</scope><scope>7U5</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20061201</creationdate><title>Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film</title><author>HO YOUNG PARK ; SANG CHEOL NAM ; YOUNG CHANG LIM ; KYU GIL CHOI ; KI CHANG LEE ; GI BACK PARK ; LEE, Seong-Rae ; HEESOOK PARK KIM ; SUNG BAEK CHO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c431t-d1c1fb0cded9e75ed52a0ab504c162af86697e096cf83d6fa394ed4a64df94c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Applied sciences</topic><topic>Battery</topic><topic>Direct energy conversion and energy accumulation</topic><topic>Electrical engineering. Electrical power engineering</topic><topic>Electrical power engineering</topic><topic>Electrochemical conversion: primary and secondary batteries, fuel cells</topic><topic>Exact sciences and technology</topic><topic>Ionic conductivity</topic><topic>Lithium</topic><topic>Oxynitrides</topic><topic>Radio frequency</topic><topic>Solid electrolytes</topic><topic>Sputtering</topic><topic>Stability</topic><topic>Thin films</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>HO YOUNG PARK</creatorcontrib><creatorcontrib>SANG CHEOL NAM</creatorcontrib><creatorcontrib>YOUNG CHANG LIM</creatorcontrib><creatorcontrib>KYU GIL CHOI</creatorcontrib><creatorcontrib>KI CHANG LEE</creatorcontrib><creatorcontrib>GI BACK PARK</creatorcontrib><creatorcontrib>LEE, Seong-Rae</creatorcontrib><creatorcontrib>HEESOOK PARK KIM</creatorcontrib><creatorcontrib>SUNG BAEK CHO</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>Electronics & Communications Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of electroceramics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>HO YOUNG PARK</au><au>SANG CHEOL NAM</au><au>YOUNG CHANG LIM</au><au>KYU GIL CHOI</au><au>KI CHANG LEE</au><au>GI BACK PARK</au><au>LEE, Seong-Rae</au><au>HEESOOK PARK KIM</au><au>SUNG BAEK CHO</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film</atitle><jtitle>Journal of electroceramics</jtitle><date>2006-12-01</date><risdate>2006</risdate><volume>17</volume><issue>2-4</issue><spage>1023</spage><epage>1030</epage><pages>1023-1030</pages><issn>1385-3449</issn><eissn>1573-8663</eissn><coden>JOELFJ</coden><abstract>Issue Title: Special Issue: ICE-2005 International Conference on Electroceramics Lithium phosphorous oxynitride(Lipon) thin films as a lithium ion conductive electrolyte were prepared by radio frequency reactive sputtering in N^sub 2^ plasma. The properties of the amorphous Lipon solid electrolyte were investigated as a function of N^sub 2^ pressure during reactive sputtering. The ionic conductivity and the electrochemical stability of Lipon thin films improved drastically as the N^sub 2^ pressure decreased. The ionic conductivity closed to 10^sup -6^ S cm^sup -1^ and obtained a stability window of 1.0-5.0 V with an N^sub 2^ pressure of 5 mTorr, where the number of nitrogen bonds between the phosphate groups were more than those formed at higher pressure. It was possible to fabricate the Li//LiCoO^sub 2^ complete thin film battery using this Lipon solid electrolyte, which exhibited excellent discharge characteristics close to the theoretical capacity (ca. 69 uAhcm^sup -2^-um^sup -1^) and showed a considerably high rate capability.[PUBLICATION ABSTRACT]</abstract><cop>Heidelberg</cop><pub>Springer</pub><doi>10.1007/s10832-006-8976-3</doi><tpages>8</tpages></addata></record> |
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| subjects | Applied sciences Battery Direct energy conversion and energy accumulation Electrical engineering. Electrical power engineering Electrical power engineering Electrochemical conversion: primary and secondary batteries, fuel cells Exact sciences and technology Ionic conductivity Lithium Oxynitrides Radio frequency Solid electrolytes Sputtering Stability Thin films |
| title | Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film |
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