Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film

Issue Title: Special Issue: ICE-2005 International Conference on Electroceramics Lithium phosphorous oxynitride(Lipon) thin films as a lithium ion conductive electrolyte were prepared by radio frequency reactive sputtering in N^sub 2^ plasma. The properties of the amorphous Lipon solid electrolyte were investigated as a function of N^sub 2^ pressure during reactive sputtering. The ionic conductivity and the electrochemical stability of Lipon thin films improved drastically as the N^sub 2^ pressure decreased. The ionic conductivity closed to 10^sup -6^ S cm^sup -1^ and obtained a stability window of 1.0-5.0 V with an N^sub 2^ pressure of 5 mTorr, where the number of nitrogen bonds between the phosphate groups were more than those formed at higher pressure. It was possible to fabricate the Li//LiCoO^sub 2^ complete thin film battery using this Lipon solid electrolyte, which exhibited excellent discharge characteristics close to the theoretical capacity (ca. 69 uAhcm^sup -2^-um^sup -1^) and showed a considerably high rate capability.[PUBLICATION ABSTRACT]