Polar Ceramics in RF-MEMS and Microwave Reconfigurable Electronics: A Brief Review on Recent Issues

Polar Ceramics in RF-MEMS and Microwave Reconfigurable Electronics: A Brief Review on Recent Issues

The properties and fabrication status of microdevices for microwaves based on polar ceramics are reviewed. Bulk acoustic wave devices with AlN films, rf-MEMS capacitive switches with high permittivity materials, and tunable ferroelectrics are discussed. The relevant properties of ferroelectrics for...

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Veröffentlicht in:Journal of electroceramics 2004-07, Vol.13 (1-3), p.215-222
Hauptverfasser: Setter, N, Sherman, V, Astafiev, K, Tagantsev, A K
Format: Artikel
Sprache:eng
Schlagworte:
Ceramics
Dielectric constant
Electronics
Ferroelectric materials
Ferroelectrics
Microwaves
Permittivity
Switches
Thin films
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Zusammenfassung:The properties and fabrication status of microdevices for microwaves based on polar ceramics are reviewed. Bulk acoustic wave devices with AlN films, rf-MEMS capacitive switches with high permittivity materials, and tunable ferroelectrics are discussed. The relevant properties of ferroelectrics for microwave applications are summarised with emphasis on composites and thin films. 22 refs.
ISSN:1385-3449
1573-8663
DOI:10.1007/s10832-004-5101-3