A programmable intraocular CMOS pressure sensor system implant

We present a programmable intraocular pressure sensor system implant integrated on a single CMOS chip. It contains an on-chip micromechanical pressure sensor array, a temperature sensor, readout and calibration electronics, a /spl mu/C-based digital control unit, and an RF transponder. The transponder enables wireless data transmission and wireless power reception, thus making batteryless operation feasible. The chip has been fabricated in a 1.2-/spl mu/m n-well CMOS process complemented by additional processing steps.