Bent-beam electrothermal actuators-Part II: Linear and rotary microengines

For Part I see L. Que, J.S. Park and Y.B. Gianchandani, ibid., vol.10, pp.247-54 (2001). This paper reports on the use of bent-beam electrothermal actuators for the purpose of generating rotary and long-throw rectilinear displacements. The rotary displacements are achieved by orthogonally arranged p...

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Veröffentlicht in:	Journal of microelectromechanical systems 2001-06, Vol.10 (2), p.255-262
Hauptverfasser:	Jae-Sung Park, Chu, L.L., Oliver, A.D., Gianchandani, Y.B.
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Applied sciences Design engineering Displacement Displacement measurement Drives Electric potential Electroplating Electrothermal effects Engines Exact sciences and technology Gears General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Laboratories Mechanical engineering. Machine design Micromachining Network address translation Nickel Parks Physics Pneumatic actuators Polysilicon Power dissipation Precision engineering, watch making Rotary engines Structural materials Transducers Voltage
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Zusammenfassung:	For Part I see L. Que, J.S. Park and Y.B. Gianchandani, ibid., vol.10, pp.247-54 (2001). This paper reports on the use of bent-beam electrothermal actuators for the purpose of generating rotary and long-throw rectilinear displacements. The rotary displacements are achieved by orthogonally arranged pairs of cascaded actuators that are used to rotate a gear. Devices were fabricated using electroplated Ni, p/sup ++/ Si, and polysilicon as structural materials. Displacements of 20-30 /spl mu/m with loading forces >150 /spl mu/N at actuation voltages
ISSN:	1057-7157 1941-0158
DOI:	10.1109/84.925774