Dynamic range improvement by narrow-channel effect suppression and smear reduction technologies in small pixel IT-CCD image sensors

Dynamic range improvement by narrow-channel effect suppression and smear reduction technologies in small pixel IT-CCD image sensors

Technologies for narrow-channel effect suppression in photodiodes (PDs) and vertical CCDs (V-CCDs) and for smear reduction in PDs have been developed in order to improve dynamic range in small pixel interline-transfer CCD (IT-CCD) image sensors. The new technologies have been applied to a progressiv...

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Veröffentlicht in:IEEE transactions on electron devices 2000-09, Vol.47 (9), p.1700-1706
Hauptverfasser: Tanabe, A., Kudoh, Y., Kawakami, Y., Masubuchi, I., Kawai, S., Yamada, T., Morimoto, M., Arai, K., Hatano, K., Furumiya, M., Naliashiba, Y., Mutoh, N., Orihara, K., Teranishi, N.
Format: Artikel
Sprache:eng
Schlagworte:
Charge
Charge coupled devices
Charge coupled image sensors
Dynamic range
Pixels
Reduction
Sensors
Smear
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Beschreibung
Zusammenfassung:Technologies for narrow-channel effect suppression in photodiodes (PDs) and vertical CCDs (V-CCDs) and for smear reduction in PDs have been developed in order to improve dynamic range in small pixel interline-transfer CCD (IT-CCD) image sensors. The new technologies have been applied to a progressive-scan IT-CCD image sensor with 5 /spl mu/m square pixels and have (1) increased the charge handling capability of its V-CCDs to 4500 electrons/V; (2) improved its smear value to -95 dB; and (3) increased the saturation charge of its PDs to 2.3/spl times/10/sup 4/ electrons.
ISSN:0018-9383
1557-9646
DOI:10.1109/16.861580