Reduction of scattering loss of silicon slot waveguides by RCA smoothing

Reduction of scattering loss of silicon slot waveguides by RCA smoothing

Because of stronger optical confinement density, silicon slot waveguides tend to have higher scattering loss than normal ridge waveguides with same sidewall roughness. A wet chemical process is found to be highly effective in reducing the surface roughness and scattering loss. A reduction in scatter...

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Veröffentlicht in:Optics letters 2012-01, Vol.37 (1), p.13-15
Hauptverfasser: Sun, Haishan, Chen, Antao, Abeysinghe, Don, Szep, Attila, Kim, Richard S
Format: Artikel
Sprache:eng
Schlagworte:
Density
Noise levels
Reduction
Ridges
Scattering
Silicon
Surface roughness
Waveguides
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container_issue 1
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container_title Optics letters
container_volume 37
creator Sun, Haishan
Chen, Antao
Abeysinghe, Don
Szep, Attila
Kim, Richard S
description Because of stronger optical confinement density, silicon slot waveguides tend to have higher scattering loss than normal ridge waveguides with same sidewall roughness. A wet chemical process is found to be highly effective in reducing the surface roughness and scattering loss. A reduction in scattering loss by 10.2 dB/cm for TE and 8.5 dB/cm for TM polarizations has been achieved.
doi_str_mv 10.1364/ol.37.000013
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source Optica Publishing Group Journals
subjects Density
Noise levels
Reduction
Ridges
Scattering
Silicon
Surface roughness
Waveguides
title Reduction of scattering loss of silicon slot waveguides by RCA smoothing
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