Reduction of scattering loss of silicon slot waveguides by RCA smoothing

Reduction of scattering loss of silicon slot waveguides by RCA smoothing

Because of stronger optical confinement density, silicon slot waveguides tend to have higher scattering loss than normal ridge waveguides with same sidewall roughness. A wet chemical process is found to be highly effective in reducing the surface roughness and scattering loss. A reduction in scatter...

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Veröffentlicht in:Optics letters 2012-01, Vol.37 (1), p.13-15
Hauptverfasser: Sun, Haishan, Chen, Antao, Abeysinghe, Don, Szep, Attila, Kim, Richard S
Format: Artikel
Sprache:eng
Schlagworte:
Density
Noise levels
Reduction
Ridges
Scattering
Silicon
Surface roughness
Waveguides
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Beschreibung
Zusammenfassung:Because of stronger optical confinement density, silicon slot waveguides tend to have higher scattering loss than normal ridge waveguides with same sidewall roughness. A wet chemical process is found to be highly effective in reducing the surface roughness and scattering loss. A reduction in scattering loss by 10.2 dB/cm for TE and 8.5 dB/cm for TM polarizations has been achieved.
ISSN:0146-9592
1539-4794
DOI:10.1364/ol.37.000013