Studies on sensitivity of porous silicon surfaces to environmental gases
We have studied the electrophysical properties of porous silicon p-n junction in an atmosphere of various gases: moisture, ammonia, benzene, acetone, and ethanol. The high sensitivity of ac conductivity to the polar gas molecules is connected with an additional pathway through the opened surface of...
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Veröffentlicht in: | Journal of materials engineering and performance 1997-04, Vol.6 (2), p.161-164 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | We have studied the electrophysical properties of porous silicon p-n junction in an atmosphere of various gases: moisture, ammonia, benzene, acetone, and ethanol. The high sensitivity of ac conductivity to the polar gas molecules is connected with an additional pathway through the opened surface of the p-n junction. |
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ISSN: | 1059-9495 1544-1024 |
DOI: | 10.1007/s11665-997-0008-1 |