Operating modes of an atmospheric pressure radio frequency plasma

The physics of an atmospheric pressure, radio frequency plasma has been investigated. The discharge is generated with helium and 0.4 vol.% nitrogen passing between two metal electrodes with a 3.0-mm gap. It was discovered that at a critical power density of 2.1 kW/cm/sup 3/, the plasma undergoes she...

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Veröffentlicht in:	IEEE transactions on plasma science 2005-04, Vol.33 (2), p.294-295
Hauptverfasser:	Xiawan Yang, Moravej, M., Nowling, G.R., Chang, J.P., Hicks, R.F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Atmospheric pressure Atmospheric pressure plasma Atmospheric-pressure plasmas Barometric pressure Breakdown Density Discharge Electrodes Helium Nitrogen Plasma (physics) Plasma density Plasma materials processing Plasma sheaths Plasma sources Radio frequencies Radio frequency Radio frequency plasma Scientific imaging Voltage
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Beschreibung
Zusammenfassung:	The physics of an atmospheric pressure, radio frequency plasma has been investigated. The discharge is generated with helium and 0.4 vol.% nitrogen passing between two metal electrodes with a 3.0-mm gap. It was discovered that at a critical power density of 2.1 kW/cm/sup 3/, the plasma undergoes sheath breakdown and transitions from the /spl alpha/- to the /spl gamma/-mode. Photographs are presented showing the unique distribution of excited-state species under these conditions.
ISSN:	0093-3813 1939-9375
DOI:	10.1109/TPS.2005.845057