A Simple Series Resistance Extraction Methodology for Advanced CMOS Devices

Series resistance has become a serious obstacle inhibiting the performance of advanced CMOS devices. However, series resistance quantification in these same advanced CMOS devices is becoming exceedingly difficult. In this letter, we demonstrate a very simple series resistance extraction procedure wh...

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Veröffentlicht in:IEEE electron device letters 2011-08, Vol.32 (8), p.1047-1049
Hauptverfasser: Campbell, J. P., Cheung, K. P., Suehle, J. S., Oates, A.
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container_issue 8
container_start_page 1047
container_title IEEE electron device letters
container_volume 32
creator Campbell, J. P.
Cheung, K. P.
Suehle, J. S.
Oates, A.
description Series resistance has become a serious obstacle inhibiting the performance of advanced CMOS devices. However, series resistance quantification in these same advanced CMOS devices is becoming exceedingly difficult. In this letter, we demonstrate a very simple series resistance extraction procedure which is derived only from the ratio of two linear ID - VG measurements. This approach has a verifiable accuracy check and is successfully used to extract the series resistance from several advanced devices. Furthermore, the validity of the assumptions used in this series resistance extraction procedure is examined and shown to be justified. In an attempt to further test the validity of this technique, several known external resistors were inserted in series with the device under test. The series resistance extraction procedure faithfully reproduces these known external resistances to within ±10%.
doi_str_mv 10.1109/LED.2011.2158183
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subjects Accuracy
Applied sciences
CMOS
CMOS integrated circuits
Design. Technologies. Operation analysis. Testing
Devices
Electronic equipment and fabrication. Passive components, printed wiring boards, connectics
Electronics
Exact sciences and technology
Extraction
Integrated circuits
Logic gates
Methodology
MOSFET circuits
MOSFETs
Obstacles
Resistance
Resistors
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Series resistance
title A Simple Series Resistance Extraction Methodology for Advanced CMOS Devices
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